An up-to-date guide to the theory and applications of RF MEMS. With detailed information about RF MEMS technology as well as its reliability and applications, this is a comprehensive resource for professionals, researchers, and students alike. * Reviews RF MEMS technologies * Illustrates new techniques that solve long-standing problems associated with reliability and packaging * Provides the information needed to incorporate RF MEMS into commercial products * Describes current and future trends in RF MEMS, providing perspective on industry growth * Ideal for those studying or working in RF and microwave circuits, systems, microfabrication and manufacturing, production management and metrology, and performance evaluation
Stepan Lucyszyn is a Reader in the Optical and Semiconductor Devices group at Imperial College, London. He has published extensively on RF MEMS, and has lectured on the subject at university and on professional short courses. An experienced editor, he co-edited RFIC and MMIC Design and Technology (IET, 2001) and serves as a Member of the Editorial Board for the IEEE/ASME Journal of Microelectromechanical Systems. He is a Fellow of the IET and a Fellow of the Institute of Physics.
1. Introduction S. Lucyszyn; 2. Electromechanical modelling of electrostatic actuators D. Elata and V. Leus; 3. Switches and their fabrication technologies T. Lisec; 4. Niche switch technologies S. Lucyszyn, S. Pranonsatit, J. Y. Choi and A. Holmes; 5. Reliability I. De Wolf; 6. Dielectric charging G. Papaioannou; 7. Stress and thermal characterisation R. Y. Fillit and R. Fortunier; 8. High power handling F. Coccetti and R. Plana; 9. Packaging H. Tilmans, A. Jourdain and P. De Moor; 10. Impedance tuners and tuneable filters A. Pothier and T. Vaha-Heikkila; 11. Phase shifters and tunable delay lines L. Dussopt; 12. Reconfigurable architectures T. Vaha-Heikkila; 13. Industry roadmap for RF MEMS J. Bouchaud, R. Sorrentino, B. Knoblich, H. Tilmans and F. Coccetti.