Advances in Metrology for X-ray and EUV Optics II (Proceedings of SPIE v. 6704)

Advances in Metrology for X-ray and EUV Optics II (Proceedings of SPIE v. 6704)

By: Peter Z. Takacs (author), Lahsen Assoufid (author), Masaru Ohtsuka (author)Paperback

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Product Details

  • publication date: 13/09/2007
  • ISBN13: 9780819468529
  • Format: Paperback
  • Number Of Pages: 168
  • ID: 9780819468529
  • ISBN10: 0819468525

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