Advances in Metrology for X-ray and EUV Optics (Proceedings of SPIE v. 5921)

Advances in Metrology for X-ray and EUV Optics (Proceedings of SPIE v. 5921)

By: Peter Z. Takacs (author), Lahsen Assoufid (author), John S. Taylor (author)Paperback

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Product Details

  • publication date: 15/08/2005
  • ISBN13: 9780819459268
  • Format: Paperback
  • Number Of Pages: 184
  • ID: 9780819459268
  • ISBN10: 0819459267

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