Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications: II (Proceedings of SPIE v. 5533)

Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications: II (Proceedings of SPIE v. 5533)

By: Udo Dinger (author), Ali M. Khounsary (author), Kazuya Ota (author)Paperback

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Product Details

  • publication date: 30/11/2004
  • ISBN13: 9780819454713
  • Format: Paperback
  • Number Of Pages: 194
  • ID: 9780819454713
  • ISBN10: 0819454710

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