Advances in Mirror Technology for x-Ray, EUV Lithography, Laser and Other Applications (Proceedings of SPIE Vol 5193)

Advances in Mirror Technology for x-Ray, EUV Lithography, Laser and Other Applications (Proceedings of SPIE Vol 5193)

By: Udo Dinger (author), Ali M. Khounsary (author), Kazuya Ota (author)Paperback

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Product Details

  • publication date: 31/10/2003
  • ISBN13: 9780819450661
  • Format: Paperback
  • Number Of Pages: 222
  • ID: 9780819450661
  • ISBN10: 0819450669

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