Advances in Resist Materials and Processing Technology XXIV (Proceedings of SPIE no. 6519)

Advances in Resist Materials and Processing Technology XXIV (Proceedings of SPIE no. 6519)

By: Qinghuang Lin (author)Paperback

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Description

Accepted papers from the SPIE Conference on Advances in Resist Materials and Processing Technology XXIV (The SPIE Resist Conference) held as part of the International Symposium on Advanced Lithography.

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Product Details

  • publication date: 15/07/2007
  • ISBN13: 9780819466389
  • Format: Paperback
  • Number Of Pages: 2
  • ID: 9780819466389
  • ISBN10: 0819466387

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