An Introduction to Microelectromechanical Systems Engineering (Microelectromechanical Systems S. 2nd Revised edition)

An Introduction to Microelectromechanical Systems Engineering (Microelectromechanical Systems S. 2nd Revised edition)

By: Nadim Maluf (author), Kirt Williams (author)Paperback

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Description

MEMS (microelectromechanical systems) technology makes possible the production of miniature devices and systems that stand to revolutionize industrial, optical, medical and electronic markets. Thousands of practitioners and students have gained a solid understanding of MEMS with the best-selling first edition of this book. Now in its second edition, An Introduction to Microelectromechanical Systems Engineering brings readers to up-to-date with the latest developments in this cutting-edge area. Featuring brand new coverage of today's hottest topics, such as RF MEMS and photonic MEMS, this thoroughly revised resource shows engineers, technical managers, and executives how their projects may benefit from a MEMS solution.

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About Author

Nadim Maluf is vice president of New Focus, Inc. and a consulting professor of electrical engineering at Stanford University. A best-selling author in the area of MEMS technology, Dr. Maluf earned his Ph.D. in electrical engineering at Stanford University. Kirt Williams is a MEMS consultant based in California's Silicon Valley. Formerly, he was a member of the technical staff at Agilent Technologies. He received his Ph.D. and M.S. in electrical engineering from the University of California at Berkeley.

Contents

MEMS: A Technology from Lilliput. The Sandbox: Materials for MEMS. The Toolbox: Processes for Micromachining. MEM Structure and Systems in Industrial and Automotive Applications. Optical MEM Structures and Systems. MEM Structures and Systems for Medical Applications. MEM Structures and Systems for Electronic Applications.

Product Details

  • publication date: 31/05/2004
  • ISBN13: 9781580535908
  • Format: Paperback, Hardback
  • Number Of Pages: 304
  • ID: 9781580535908
  • weight: 745
  • ISBN10: 1580535909
  • edition: 2nd Revised edition

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