Electronics and Structures for Mems (Proceedings of SPIE Vol 3891)

Electronics and Structures for Mems (Proceedings of SPIE Vol 3891)

By: Neil W. Bergmann (editor), C. Tien (editor), Olaf Reinhold (editor)Paperback

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Description

A selection of 51 papers on various aspects of the electronics and structures used in the field of microelectromechanical systems.

Product Details

  • ISBN13: 9780819434920
  • Format: Paperback
  • Number Of Pages: 428
  • ID: 9780819434920
  • weight: 998
  • ISBN10: 0819434922

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