FBAR, MEMS and NEMS Resonator Design and Applications

FBAR, MEMS and NEMS Resonator Design and Applications

By: Humberto Campanella (author)Hardback

Up to 2 WeeksUsually despatched within 2 weeks

Description

This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensing and RF systems. Moreover, this one-stop resource looks at the main characteristics, differences, and limitations of FBAR, MEMS, and NEMS devices, helping you to choose the right approaches for your projects. Over 280 illustrations and more than 130 equations support key topics throughout the book.

About Author

This groundbreaking book provides a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, professionals find extensive coverage of these devices at both the technology and application levels. This practical reference offers guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard technologies, and their application to sensing and RF systems. Moreover, this one-stop resource looks at the main characteristics, differences, and limitations of FBAR, MEMS, and NEMS devices, helping practitioners to choose the right approaches for their projects. RF and microwave, telecommunications, material and process, and MEMS/NEMS engineers and scientists. Humberto Campanella is an associate professor at the Universitat Autonoma de Barcelona (UAB) and serves on the graduate research staff at the Centro Nacional de Microelectronica in Barcelona. He holds a Ph.D. in both electronics engineering and microelectronics and automated systems from Universitat Autonoma de Barcelona and the Universite Montpellier II in France, respectively.

Contents

Preface; Part I: Introduction to Thin-Film Bulk Acoustic Wave Resonators (FBAR), Micro and Nano Electro Mechanical System (M/NEMS) Resonators - MEMS and NEMS Resonator Technologies; Acoustic Resonator Technologies; Design and Modeling of Micro and Nano Resonators; Part II: Fabrication Technologies and CMOS Integration - Fabrication Techniques; Characterization Techniques; Performance Optimization; Integration of Resonator to CMOS Technologies; Part III: Applications of FBAR, MEMS, NEMS Resonators - Sensor Applications; Radio Frequency (RF) Applications; Case Studies: Modeling, Design and Fabrication of FBAR and MEMS-Based Systems.

Product Details

  • ISBN13: 9781607839774
  • Format: Hardback
  • Number Of Pages: 390
  • ID: 9781607839774
  • weight: 816
  • ISBN10: 1607839776

Delivery Information

  • Saver Delivery: Yes
  • 1st Class Delivery: Yes
  • Courier Delivery: Yes
  • Store Delivery: Yes

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