Handbook of Microlithography, Micromachining, and Microfabrication (Press Monograph illustrated Edition)

Handbook of Microlithography, Micromachining, and Microfabrication (Press Monograph illustrated Edition)

By: P. Rai-Choudhury (author)Hardback

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Description

Part of a compilation of diverse information into a single, two-volume resource just at the moment when researchers are weighing the alternatives to visible light that will be necessary to etch features smaller than 0.13 microns. Volume Two focuses on the process technology and the device applicatio

Contents

v. 1. Microlithography -- v. 2. Micromachining and microfabrication.

Product Details

  • ISBN13: 9780819423795
  • Format: Hardback
  • Number Of Pages: 698
  • ID: 9780819423795
  • ISBN10: 0819423793
  • edition: illustrated Edition

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