In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing II (Proceedings of SPIE Vol 3509)

In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing II (Proceedings of SPIE Vol 3509)

By: Sergio Ajuria (editor), Tim Z. Hossain (editor)Paperback

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Description

A collection of papers on in-line characterization techniques for performance and yield enhancement in microelectronic manufacturing. They cover: electrical/field emission techniques; optical and em-wave techniques; and surface photovoltage techniques.

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Product Details

  • publication date: 30/09/1998
  • ISBN13: 9780819429681
  • Format: Paperback
  • Number Of Pages: 254
  • ID: 9780819429681
  • ISBN10: 0819429686

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