Industrial Plasma Technology: Applications from Environmental to Energy Technologies

Industrial Plasma Technology: Applications from Environmental to Energy Technologies

By: Hideo Ikegami (editor), Akihisa Matsuda (editor), Noriyoshi Sato (editor), Kiichiro Uchino (editor), Masayuki Kuzuya (editor), Akira Mizuno (editor), Yoshinobu Kawai (editor)Hardback

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Clearly structured in five major sections on applications, this monograph covers such hot technologies as nanotechnology, solar cell technology, biomedical and clinical applications, and sustainability. Since the topic, applications and readers are highly interdisciplinary, the book bridges materials science, industrial chemistry, physics, and engineering -- making it a must-have for researchers in industry and academia, as well as those working in application-oriented plasma technology.

About Author

Hideo Ikegami is Professor Emeritus of both Nagoya University and National Institute for Fusion Science in Nagoya, Japan. His primary interest is basic plasma physics and various plasma applications. In 1996, he created a consulting company of plasma application technology, Technowave Inc., and served as president. He is one of the editors of Advanced Plasma Technology (Wiley-VCH, 2007). Noriyoshi Sato has worked in research and education on plasma physics and is now Professor Emeritus at Tohoku University, Japan. His primary interest is basic plasma behaviour related to various plasma applications. He is elevating his works in collaboration with companies. He is one of the editors of Advanced Plasma Technology (Wiley-VCH, 2007). Akihisa Matsuda is Special Guest Professor at the Graduate School of Engineering Science of Osaka Univeristy, Japan, since 2007, after being Director of Research Initiative for Thin Film Silicon Solar Cells at the National Institute of Advanced Industrial Science and Technology (AIST), Japan. His main field of interest are plasma-process diagnostics and process control for thin film silicon solar cells. Kiichiro Uchino is currently Professor at the Department of Applied Science for Electronics and Materials at Kyushu University in Fukuoka, Japan. He is working on laser-aided diagnostics of plasmas and various industrial plasma applications. Masayuki Kuzuya is currently the Dean of College of Pharmaceutical Sciences, and Professor of Pharmaceutical Physical Chemistry at Matsuyama University, Japan. His research interest is in the field of fundamental studies of organic plasma chemistry and its bio- and pharmaceutical applications. Akira Mizuno is Professor of the Department of Ecological Engineering at Toyohashi University of Technology. His research includes applied electrostatics and high-voltage engineering, which includes electrostatic precipitation, environmental application of plasma, sterilization and other environmental friendly technologies as well as manipulation and measurement of single DNA molecules. He is editor of the International Journal of Plasma Environmental Science and Technology. Yoshinobu Kawai works as Research Professor at Interdisciplinary Graduate School of Engineering Sciences at Kyushu University, Japan, since 1974. He is expert in production of large diameter plasma in the frequency range from VHF to microwave for amorphous and microcrystalline silicon solar cell and etching. He is one of the editors of Advanced Plasma Technology (Wiley-VCH, 2007).


PREFACE INTRODUCTION TO PLASMAS Plasmas Discharge Plasmas ENVIRONMENTAL APPLICATION OF NONTHERMAL PLASMA ATMOSPHERIC PLASMA AIR POLLUTION CONTROL, SOLID WASTE, AND WATER TREATMENT TECHNOLOGIES: FUNDAMENTAL AND OVERVIEW Introduction Type of Plasmas Plasma Chemistry Plasma Reactor Determination of Plasma Parameters and the Other Phenomena Engineering and Economics Concluding Remarks References OPTICAL DIAGNOSTICS FOR HIGH-PRESSURE NONTHERMAL PLASMA ANALYSIS Introduction Experimental Examples Conclusions References LASER INVESTIGATIONS OF FLOW PATTERNS IN ELECTROSTATIC PRECIPITATORS AND NONTHERMAL PLASMA REACTORS Introduction PIV Experimental Setups Conclusions Acknowledgment References WATER PLASMAS FOR ENVIRONMENTAL APPLICATION Introduction Water Plasma Generation and Its Characteristics Decomposition of halogenated Hydrocarbons Conclusion References CHEMISTRY OF ORGANIC POLLUTANTS IN ATMOSPHERIC PLASMAS Introduction Experimental Results and Discussion Conclusions Acknowledgments References GENERATION AND APPLICATION OF WIDE AREA PLASMA Introduction AirFlow Control Aerodynamic Plasma Actuators Particle Destruction Large Sliding Discharge Conclusion References NONTHERMAL PLASMA-BASED SYSTEM FOR EXHAUST TREATMENT UNDER REDUCED ATMOSPHERE OF PYROLYSIS GASES Introduction Experimental Results Conclusions Acknowledgments References PHARMACEUTICAL AND BIOMEDICAL ENGINEERING BY PLASMA TECHNIQUES Introduction Nature of Plasma-Induced Polymer Radicals Pharmaceutical Engineering for DDS Preparation by Plasma Techniques Biomedical Engineering by Plasma Techniques Conclusion Acknowledgments References TARGETING DENDRITIC CELLS WITH CARBON MAGNETIC NANOPARTICLES MADE BY DENSE-MEDIUM PLASMA TECHNOLOGY References APPLICATIONS OF PULSED POWER AND PLASMAS TO BIOSYSTEMS AND LIVING ORGANISMS Introduction Pulsed-Power Source Using Magnetic Pulse Compression System Discharge Plasmas by Pulsed Power Action of Pulsed Power and Discharge Plasma to Biosystem Summary References APPLICATIONS OF PLASMA POLYMERIZATION IN BIOMATERIALS Introduction Example 1: Improving Surfaces for Blood Biocompatibility Example 2: Foreign Body Response Example 3: Extended Wear Contact Lenses Example 4: Platform for Immobilizing a Biomolecule Example 5: An Improved Surface Plasmon Resonance Biosensor Conclusions References PLASMA STERILIZATION AT NORMAL ATMOSPHERIC PRESSURE Introduction Experimental Schemes Experimental Result Conclusion Acknowledgments References ELIMINATION OF PATHOGENIC BIOLOGICAL RESIDUALS BY MEANS OF LOW-PRESSURE INDUCTIVELY COUPLED PLASMA DISCHARGE Introduction Experimental Results Conclusions Acknowledgments References STERILIZATION AND PROTEIN TREATMENT USING OXYGEN RADICALS PRODUCED BY RF DISCHARGE Introduction Experimental Procedure Generation of Oxygen Radicals Sterilization of Medical Equipments Decomposition of Protein's Structure References HYDROPHILICITY AND BIOACTIVITY OF A POLYETHYLENE TEREPHTHALATE SURFACE MODIFIED BY PLASMA-INITIATED GRAFT POLYMERIZATION Introduction Experimental Results and Discussion Conclusions References STRATEGIES AND ISSUES ON THE PLASMA PROCESSING OF THIN-FILM SILICON SOLAR CELLS Introduction Growth Process of a-Si: H and ?c-Si : H by PECVD Growth of High-Quality a-Sie : H Concept of Protocrystal a-Si : H (Stable a-Sie : H) Growth of High-Quality ?c-Si : H Summary Reference CHARACTERISTICS OF VHF PLASMA WITH LARGE AREA Introduction Development of Balanced Power Feeding Method Characteristics of VHF Plasma Summary References DEPOSITION OF A-SI : H FILMS WITH HIGH STABILITY AGAINST LIGHT EXPOSURE BY REDUCING DEPOSITION OF NANOPARTICLES FORMED IN SIH4 DISCHARGES Introduction Formation Mechanism of Nanoparticles in Silane Discharges Contribution of Higher Order Silane Molecules and Nanoparticles to SiH2 Bond Formation in Films Effects of Nanoparticles on a-Si : H Qualities High Rate Deposition of a-Si : H Films of High Stability against Light Exposure Using Multihollow Discharge Plasma CVD Conclusions Acknowledgments References DIAGNOSTICS AND MODELING OF SIH4/H2 PLASMAS FOR THE DEPOSITION OF MICROCRYSTALLINE SILICON: THE CASE OF DUAL-FREQUENCY SOURCES Introduction Experimental Model Description Results and Discussion Conclusions Acknowledgments References INTRODUCTION TO DIAMOND-LIKE CARBONS DIAMOND-LIKE CARBON FOR APPLICATIONS Introduction Growth Rates Basic Properties Stress Applications of DLC MEMs Electronic Applications Bioactive Surfaces Conclusions Acknowledgments References APPLICATIONS OF DLCS TO BIOPROCESSING Introduction High-Tenacity DLC Tin Films for Stents Applications of DLC Films to Coronary Drug-Eltuing Stent DLC Films with Controlled Zeta Potential of Biomaterials Characerization of Biomimetic DLC and In vitro Biocompatibility Evaluation Conclusion Acknowledgments References PLASMA PROCESSING OF NANOCRYSTALLINE SEMICONDUCTIVE CUBIC BORON NITRIDE THIN FILMS Introduction Fundamental Properties of cBN Growth of cBN Thin Films Doping Processes and Electrical Characterization Conclusion References FUNDAMENTALS ON TRIBOLOGY OF PLASMA-DEPOSITED DIAMOND-LIKE CARBON FILMS Introduction Special Case of DLC Coatings Superlubricity of DLC Coatings Conclusion References DIAMOND-LIKE CARBON THIN FILMS GROWN IN PULSED-DC PLASMAS Introduction Experimental Details Results and Discussion Conclusions Acknowledgments References PLASMA DEPOSITION OF N-TIO2 THIN FILMS Introduction Experimental Setup and Diagnostic Techniques Results and Discussion Acknowledgments References INVESTIGATION OF DLC AND MULTILAYER COATINGS HYDROPHOBIC CHARACTER FOR BIOMEDICAL APPLICATIONS Introduction Experimental Setup Results and Discussions Conclusions Acknowledgments References CREATION OF NOVEL ELECTROMAGNETIC AND REACTIVE MEDIA FROM MICROPLASMAS Introduction Microplasma in Single Use as Plasma Microplasma Integration for Large-Area Material Processing Microplasma Integration for Electromagnetic Media Concluding Remarks and Perspectives Acknowledgments References NANOBLOCK ASSEMBLY USING PULSE RF DISCHARGES WITH AMPLITUDE MODULATION Introduction Formation of Nanoblocks and Their Agglomeration Assembly of Nanoblocks in Gas Phase Using Agglomeration Conlusions Acknowledgments References THOMSON SCATTERING DIAGNOSTICS OF DISCHARGE PLASMAS Introduction Application to Low-Pressure Plasmas Diagnostics of PDP Plasmas Diagnostics of EUV Plasmas CRYSTALLIZED NANODUST PARTICLES GROWTH IN LOW-PRESSURE COLD PLASMAS Introduction Description of the Experimental Setup Detection of Nanocrystallites Formation in the Plasma Gas Phase Atomic Structure of the Nanocrystallites Size and Crystalline Volume Fraction Measurements Gas Temperature Effects on Dust Nanoparticle Nucleation and Growth Conclusions References COLLECTION AND REMOVAL OF FINE PARTICLES IN PLASMA CHAMBERS Introduction NFP-collector Ditch Gudance Plate Cleaning Effects on Particles Produced in Plasmas Conclusions Acknowledgments References INDEX

Product Details

  • ISBN13: 9783527325443
  • Format: Hardback
  • Number Of Pages: 464
  • ID: 9783527325443
  • weight: 986
  • ISBN10: 3527325441

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