Inertial Microsensors (MEMS Reference Shelf)
By: Andrei M. Shkel (author)Hardback
1 - 2 weeks availability
This excellent volume lays out methods for the analysis and design of inertial micromachined sensors. The aim of the book is to provide readers with a solid foundation in the theory of inertial measurement, introduce them to design fundamentals, and provide them with design recipes for implementation of inertial instruments on the micro-scale. All of the discussions in the book are supported by constructive computational examples illustrating the material.
Theory of Inertial Measurement.- Devices for Inertial Measurement.- Design Fundamentals.- Accelerometers.- Gyroscopes.- Sources of Errors in Inertial Sensors.-Fabrication Techniques for Inertial Sensors.- Advanced Topics in Inertial Sensors Development.- Packaging of Inertial Sensors.
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- ID: 9780387355405
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