Introduction to Microlithography (ACS Professional Reference Books 2nd Revised edition)

Introduction to Microlithography (ACS Professional Reference Books 2nd Revised edition)

By: etc. (editor), C. Grant Willson (editor), Murrae J. Bowden (editor), L. F. Thompson (editor)Hardback

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Description

Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.

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Contents

An Introduction to Lithography ; The Lithographic Process: The Physics ; Organic Resist Materials ; Resist Processing ; Plasma Etching

Product Details

  • publication date: 01/01/1994
  • ISBN13: 9780841228481
  • Format: Hardback
  • Number Of Pages: 540
  • ID: 9780841228481
  • weight: 888
  • ISBN10: 0841228485
  • edition: 2nd Revised edition

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  • Saver Delivery: Yes
  • 1st Class Delivery: Yes
  • Courier Delivery: Yes
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