Laser-Assisted Microtechnology (Springer Series in Materials Science 19 Softcover reprint of the original 1st ed. 1998)
By: Simeon M. Metev (author), Vadim P. Veiko (author)Paperback
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Laser-Assisted Microtechnology deals with laser applications to a wide variety of problems in microelectronic design and fabrication. It covers micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The monograph describes fundamental aspects and practical details of the technological processes as well as the optimum conditions for their realization.
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- ID: 9783642973291
Softcover reprint of the original 1st ed. 1998
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