Laser-Assisted Microtechnology (Springer Series in Materials Science 19 Softcover reprint of the original 1st ed. 1998)

Laser-Assisted Microtechnology (Springer Series in Materials Science 19 Softcover reprint of the original 1st ed. 1998)

By: Simeon M. Metev (author), Vadim P. Veiko (author)Paperback

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Description

Laser-Assisted Microtechnology deals with laser applications to a wide variety of problems in microelectronic design and fabrication. It covers micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The monograph describes fundamental aspects and practical details of the technological processes as well as the optimum conditions for their realization.

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Product Details

  • publication date: 31/07/2012
  • ISBN13: 9783642973291
  • Format: Paperback
  • Number Of Pages: 288
  • ID: 9783642973291
  • weight: 408
  • ISBN10: 3642973299
  • edition: Softcover reprint of the original 1st ed. 1998

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