Lithographic and Micromachining Techniques for Optical Component Fabrication: II (Proceedings of SPIE Vol 5183)

Lithographic and Micromachining Techniques for Optical Component Fabrication: II (Proceedings of SPIE Vol 5183)

By: Ernst-Bernhard Kley (author), Hans Peter Herzig (author)Paperback

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Product Details

  • publication date: 31/10/2003
  • ISBN13: 9780819450562
  • Format: Paperback
  • Number Of Pages: 208
  • ID: 9780819450562
  • ISBN10: 0819450561

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