Lithographic and Micromachining Techniques for Optical Component Fabrication (Proceedings of SPIE v. 4440)

Lithographic and Micromachining Techniques for Optical Component Fabrication (Proceedings of SPIE v. 4440)

By: Ernst-Bernhard Kley (author), Hans Peter Herzig (author)Paperback

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Product Details

  • publication date: 09/11/2001
  • ISBN13: 9780819441546
  • Format: Paperback
  • Number Of Pages: 334
  • ID: 9780819441546
  • ISBN10: 0819441546

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