Lithography Process Control (Tutorial Texts Vol TT28)

Lithography Process Control (Tutorial Texts Vol TT28)

By: Harry J. Levinson (author)Paperback

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This tutorial text covers lithography process control at several levels, from fundamental through advanced topics. A basic familiarity with lithography science is assumed. The book is intended to be a self contained tutorial that works as an introduction to those entering the field, and as a reference for the experienced lithography engineer.

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Introduction to the use of statistical process control in lithography; sampling; simple and complex processes; linewidth control; overlay; yield; process drift and automatic process control; metrology; control of operations.

Product Details

  • publication date: 31/05/1999
  • ISBN13: 9780819430526
  • Format: Paperback
  • Number Of Pages: 194
  • ID: 9780819430526
  • weight: 449
  • ISBN10: 0819430528

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