The silicon age that led the computer revolution has significantly changed the world. The next 30 years will see the incorporation of new types of functionality onto the chip-structures that will enable the chip to reason, to sense, to act and to communicate. Micromachining technologies offer a wide range of possibilities for active and passive devices. Recent developments have produced sensors, actuators and optical systems. Many of these technologies are based on surface micromachining, which has evolved from silicon integrated circuit technology. This book is written by experts in the field. It contains useful details in design and processing and can be utilized as a reference book or as a textbook.
MEMS/MOEMS Technology Capabilities and Trends; Operation and Design of MEMS/MOEMS Devices; MEMS Modelling and Design Tools; The Digital Micromirror Device - a Micro-Optical Electromechanical Device for Display Applications; Optical Waveguides and Silicon-Based Micromachined Architectures; Silicon Micromachines in Optical Communications Networks - ""Tiny Machines for Large Systems""; Assembly and Test for MEMS and Optical MEMS, MEMS, Microsystems, Micromachines - ""Commercializing an Emergent Disruptive Technology"".