Optical Microlithography Xi

Optical Microlithography Xi

By: Hove (author)Paperback

Up to 2 WeeksUsually despatched within 2 weeks


A study of optical microlithography. It contains papers on subjects such as phase-shifting masks, CD control scanners, process optimization, and advanced masks.

Product Details

  • ISBN13: 9780819427793
  • Format: Paperback
  • Number Of Pages: 1106
  • ID: 9780819427793
  • ISBN10: 0819427799

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