Photomask Technology and Management-Annual Bacus Symposium 18Th

Photomask Technology and Management-Annual Bacus Symposium 18Th

By: Frank E. Abboud (volume_editor), Brian J. Grenon (volume_editor)Paperback

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Description

This work brings together 68 papers from the 18th Bacus symposium on photomask technology and management. It covers photomask patterning, defects, inspection, repair, mask metrology and advanced mask metrology.

Product Details

  • ISBN13: 9780819430076
  • Format: Paperback
  • Number Of Pages: 686
  • ID: 9780819430076
  • ISBN10: 0819430072

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