Process, Equipment, and Materials Control in Integrated Circuit Manufacturing IV (Proceedings of SPIE Vol 3507)

Process, Equipment, and Materials Control in Integrated Circuit Manufacturing IV (Proceedings of SPIE Vol 3507)

By: Kim Dang (editor), Anthony J. Toprac (editor)Paperback

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Description

A discussion of process, equipment, and materials control in integrated circuit manufacturing. It examines real-time and run-to-run modelling and control in integrated circuit manufacturing, the process of optimization in integrated circuit manufacturing, and more.

Product Details

  • ISBN13: 9780819429667
  • Format: Paperback
  • Number Of Pages: 330
  • ID: 9780819429667
  • ISBN10: 081942966X

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