Process, Equipment, and Materials Control in Integrated Circuit Manufacturing V (Proceedings of SPIE Vol 3882)

Process, Equipment, and Materials Control in Integrated Circuit Manufacturing V (Proceedings of SPIE Vol 3882)

By: Kim Dang (editor), Anthony J. Toprac (editor)Hardback

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Description

These papers on the manufacture of integrated circuitry focus on the areas of process, equipment and materials control.

Product Details

  • ISBN13: 9780819434791
  • Format: Hardback
  • Number Of Pages: 318
  • ID: 9780819434791
  • ISBN10: 0819434795

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